Growth of 3C-SiC Bulk Material by the Modified Lely Method
Author:
Affiliation:
1. University of Erlangen-Nürnberg
2. Friedrich-Alexander-Universität Erlangen-Nürnberg
3. Hoya Corporation
4. Universität Erlangen-Nürnberg
5. Friedrich-Alexander Universität Erlangen-Nürnberg
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.scientific.net/MSF.457-460.151.pdf
Reference15 articles.
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3. G. Pensl, M. Bassler, F. Ciobanu, V.V. Afanas'ev, H. Yano, T. Kimoto and H. Matsunami: Mat. Res. Soc. Symp. Proc. Vol. 640 (2001), p. H3. 2. 1.
4. H. Matsunami, S. Nishino and H. Ono: IEEE Trans. Electron. Dev. ED-38 (1981), p.235.
5. S. Nishino, J. A. Powell and W. Will: Appl. Phys. Lett. Vol. 42 (1983), p.460.
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