Affiliation:
1. TranSiC /Fairchild Semiconductor.
2. Semisouth Laboratories Inc.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference16 articles.
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5. L.G. Fursin, J.H. Zhao, M. Weiner: Electronic Letters, Vol. 37, No. 17, August 2001 Table 1: Comparison of the results of the current and previous works Previous work This work Wafer # 1 2 3 4 5 Epi thickness/doping, [µm / cm-3] 10/2x10.