Defects in He+ Irradiated 6H-SiC Probed by DLTS and LTPL Measurements
Author:
Affiliation:
1. ST-Microelectronics
2. CNR-IMM
3. Epitaxial Technology Center
4. University of Catania
5. INFM, Università di Catania
6. Consiglio Nazionale delle Ricerche (CNR)
7. Istituto per la Microelettronica e Microsistemi IMM-CNR
8. Università di Catania
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.scientific.net/MSF.457-460.493.pdf
Reference16 articles.
1. D. Dwight, M. V. Rao, O. W. Holland, G. Kelner, P. H. Chi, J. Kretchmer and M. Ghezzo: J. Appl. Phys. Vol. 82 (1997), p.5327.
2. M. Lazar, L. Ottaviani, M.L. Locatelli, C. Raynaud, D. Planson, E. Morvan, P. Godignon, W. Skorupa and J.P. Chante: Mater. Sci. Forum Vol. 353-356 (2001), p.571.
3. P. Musumeci, L. Calcagno, M.G. Grimaldi and G. Foti: Appl. Phys. Lett. Vol. 69 (1996), p.468.
4. G. Pensl and W.J. Choyke: Physica B Vol. 185 (1993), p.264.
5. T. Frank, M. Weidner, H. Itoh and G. Pensl: Mater. Sci. Forum Vol. 353-356 (2001), p.439.
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electrical Characterisation of 4H-SiC Epitaxial Samples Treated by Hydrogen or Helium;Materials Science Forum;2007-09
2. The effect of irradiation on the properties of SiC and devices based on this compound;Semiconductors;2007-07
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