SiC Devices with ONO Stacked Dielectrics

Author:

Lipkin Lori A.1,Palmour John W.1

Affiliation:

1. Cree, Incorporation

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Highly reliable SiO2/SiN/SiO2(ONO) gate dielectric on 4H-SiC;Electronics and Communications in Japan (Part II: Electronics);2007

2. Silicon carbide and diamond for high temperature device applications;Journal of Materials Science: Materials in Electronics;2006-01

3. Status and Prospects of SiC Power Devices;IEEJ Transactions on Industry Applications;2006

4. High-Temperature Electronic Materials: Silicon Carbide and Diamond;Springer Handbook of Electronic and Photonic Materials;2006

5. A numerical comparison between MOS control and junction control high voltage devices in SiC technology;Solid-State Electronics;2003-04

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