Affiliation:
1. Seoul National University
Abstract
Hillocks were observed in various thick Al films after annealing for a long time and their
density and diameter were measured using an image analysis program. The hillock density decreased
while the diameter increased with increasing film thickness. The total hillock volume per unit area of
the film is linearly proportional to the film thickness and annealing temperature. Based on the results
of our investigation, the effect of the film thickness, grain size and annealing temperature on hillock
formation is discussed, and an equation that can be used to predict the hillock density and average
hillock diameter is suggested.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science