Prototype of Atomic Force Microscope with High Resolution Optical Microscope for Observing Magnetic Nanodot Arrays

Abstract

This paper is dedicated to develop an atomic force microscope (AFM) system cou-pled with a high resolution optical microscope (OM), which serves to observe AFM image from a desired micro-area. The system employs through-the-lens optical path for detecting atomic force based on optical lever. By switching the objective lenses from low to high magni cation, a micro-area for obtaining AFM image can be easily found. AFM images of magnetic nanodotarrays with 300 nm and 150 nm pitches are obtained from two local micro-areas using the system. The results demonstrate the proposed prototype has the su cient function to nd out a micro-area for obtaining AFM image.