New Estimation Method of Sample Properties in Dynamic AFM

Abstract

This study presents a novel estimation method of sample properties in dynamic mode Atomic Force Microscope (AFM). A cantilever mock system without the interaction with sample is used to generate a reference trajectory for deflection and the control synthesis problem is posed in a robust optimal control and multi-objective LMI framework. This design assumes the nonlinear tip-sample interaction force as a disturbance and estimates it through disturbance rejection technique. The sample topography and properties can be obtained by interpreting the estimated tip-sample interaction force and applying tip-sample interaction models.