Modeling and Active Control of Circular Electrostatic Torsional Micromirror

Abstract

Three main obstacles in modeling electrostatic torsional micromirror are hard to calculate – damping coefficient, mechanical spring constant and electrostatic torsion accurately. Because that parameter variations and model uncertainty of the torsional micromirror resulting from fabrication imperfections are inevitable, it is another problem to seek a control scheme for achieving accurate positioning and trajectory tracking of an electrostatic torsional micromirror. In this paper, aimed at a real prototype of circular electrostatic torsional micromirrorr, both static and dynamic behaviors are modeled and studied. A novel nonlinear Proportional, Integral and Derivative (PID) control are proposed in succession. Simulation results show that the system model derived is more accurate to the micromirror and the nonlinear PID can eliminate the static deviation.