Improving the nonlinear proportional-derivative control for an MEMS torsional mirror with parametric uncertainties-Reference-Cited by-同舟云学术

Improving the nonlinear proportional-derivative control for an MEMS torsional mirror with parametric uncertainties

Published:2015-07-30 Issue:7 Volume:54 Page:077103
ISSN:0091-3286
Container-title:Optical Engineering
language:en
Short-container-title:Opt. Eng

Author:

Bai Cheng¹,Huang Jin²

Affiliation:

1. Xidian University, Ministry of Education, Key Laboratory of Electronic Equipment Structure Design, P.O. Box 304, 2 South Taibai Road, Shaanxi, Xi’an 710071, ChinabXi’an Communication Institute, Guangming Road Jia 5, Wangqu Town, Changan District, Shaanxi,

2. Xidian University, Ministry of Education, Key Laboratory of Electronic Equipment Structure Design, P.O. Box 304, 2 South Taibai Road, Shaanxi, Xi’an 710071, China

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference18 articles.

1. Design and nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch

2. Electrostatic MEMS Variable Optical Attenuator With Rotating Folded Micromirror

3. Modeling of an electrostatic torsional micromirror for laser projection system

4. Electrostatic pull-in instability in MEMS/NEMS: A review

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