Affiliation:
1. Xuzhou Air Force College
2. Chinese Academy of Sciences
Abstract
A series of CrTiN films were successfully deposited by medium frequency magnetron sputtering in a mixture gas of nitrogen and argon. X-ray diffraction analysis shows that the CrTiN have preferential orientation of (200). The films show low friction and low wear rate at a certain percentage of the Ti content.
Publisher
Trans Tech Publications, Ltd.
Reference9 articles.
1. P. Hones, R. Sanjine, F. Levy, Sputter deposited chromium nitride based ternary compounds for hard coatings, Thin Solid Films, 332(1998) 240-246.
2. I. Milosev, B. Navinsek, J. Electrochem. Soc. 140(1993) L30.
3. J. Vetter, R. Knaup, H. Duletzki, E. Schneider, S. Vogler, Surf. Coat. Technol. 86/87(1996) 739.
4. C. Wiemer, Structural and electronical properties of hard transition metal nitrides: Ti1-xVxNy and Ti1-xMoxNx sputtered thin films, Thesis Nr. 1535, EPFL, (1996).
5. H. A. Jehn, F. Thiergarten, E. Ebersbach, D. Fabian, Surf. Coat. Technol. 50(1991) 45.
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献