Affiliation:
1. Jiang Xi Normal University
Abstract
As the most important error source in the heterodyne interferometer, the nonlinearity errors reduce the measurement accuracy in the nanometric or picometric measurement. This survey states both the definition of nonlinearity errors and the cause of the errors. Moreover, two kinds of methods for detection and compensation of the nonlinearity errors are also discussed respectively in this paper.
Publisher
Trans Tech Publications, Ltd.