Affiliation:
1. Tsinghua University
2. China University of Geosciences
Abstract
Wave-heated discharges are well known as high-efficiency methods to generate high-density plasma at low pressures. In this paper, three types of plasma sources based on different wave-heated discharge principles are introduced systematically. Electron cyclotron resonance plasma, helicon wave plasma, and surface wave plasma systems are promising to be the next generation of plasma sources to meet increasingly strict requirements in microelectronics industry due to their remarkable advantages over conventional plasma sources.
Publisher
Trans Tech Publications, Ltd.
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Cited by
2 articles.
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