Low-Cost Optical Measurement for Micro-Displacement with High Accuracy

Abstract

Micro-displacement measurement with high accuracy plays a vital role in micro/nano manufacturing technology. In this paper, three low-cost techniques for micro-displacement measurement with high accuracy are discussed, and they are the methods based on DVD optical head, burred images and stop-action images. The techniques based on the DVD optical head and burred images are very attractive for many applications where the low cost is indispensable, and the method based on stop-action images has also better performance when measuring the static micro-displacement. Then, an application based on the stop-action images approach is given, and this method can measure the micro-displacement with nanometer accuracy. In addition, these discussions show that the methods based on the DVD optical head and burred images are a possible direction for low-cost micro-displacement measurement with high accuracy.