Affiliation:
1. Research Institute for Nuclear and Particle Physics
2. Hungarian Academy of Sciences
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
5 articles.
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1. Effect of MeV energy He and N pre-implantation on the formation of porous silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-06
2. Porous silicon implanted with nitrogen by plasma immersion ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-04
3. Ion beam characterisation and modification of porous silicon;PHYS STATUS SOLIDI A;2000
4. Ion Beam Characterisation and Modification of Porous Silicon;physica status solidi (a);2000-11
5. Semiconductor processing by plasma immersion ion implantation;Materials Science and Engineering: A;1998-09