Affiliation:
1. National Institute of Advanced Industrial Science and Technology (AIST)
2. Chubu University
3. Tech HM
4. R&D Partnership for Future Power Electronics Technology
Abstract
In this study, we report electric discharge machining (EDM) as a new cutting method for
silicon carbide (SiC) single crystals. Moreover, we discuss characteristics and usefulness of the EDM
for the SiC. The EDM realized not only high speed and smooth cutting but also lower surface damage.
Defect propagation in the EDM SiCs have been also estimated by etch pits observation using molten
KOH, however, we confirmed the EDM has caused no damage inside the SiCs in spite of high voltage
and high temperature during the machining.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
29 articles.
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