A novel technique for slicing SiC ingots by EDM utilizing a running ultra-thin foil tool electrode

Author:

Zhao Yonghua,Kunieda Masanori,Abe Kohzoh

Funder

Japan Society for the Promotion of Science

Publisher

Elsevier BV

Subject

General Engineering

Reference23 articles.

1. Springer handbook of crystal growth;Dhanaraj,2010

2. Silicon carbide 1: Growth, defects, and novel applications;Friedrichs,2010

3. Silicon carbide 2: Power devices and sensors;Friedrichs,2010

4. Basic mechanisms and models of multi-wire sawing;Möller;Adv Eng Mater,2004

5. Wafering of silicon crystals;Möller;Phys Status Solidi A,2006

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1. Study of electrical discharge machining of narrow grooves with foil tool electrode;The International Journal of Advanced Manufacturing Technology;2023-09-07

2. Electrical discharge machining of semiconductor materials: A review;Journal of Materials Research and Technology;2023-07

3. Fabrication of through-holes of different shapes using foil tool in EDM: Process development and analysis;Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering;2023-04-27

4. Methods for ceramic machining;Advanced Flexible Ceramics;2023

5. Review of the Causes of Wire Breakage and Its Mitigation During the Wire Electric Discharge Machining Process;Journal of Manufacturing Science and Engineering;2022-12-12

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