ELID Grinding Properties of High-Strength Reaction-Sintered SiC

Author:

Dai Y.1,Ohmori Hitoshi2,Lin Wei Min3,Eto H.,Ebizuka N.,Tsuno K.4

Affiliation:

1. Wuhan University of Technology

2. RIKEN

3. The Institute of Physical and Chemical Research (RIKEN)

4. NEC TOSHIBA Space Systems Ltd.

Abstract

The high-strength reaction-sintered silicon carbide (RS-SiC) developed by TOSHIBA is one of the most excellent materials for large-scale space-borne optics. The bending strength of the high-strength RS-SiC is two times higher than other SiC ceramics. The purpose of this study is to investigate the ELID grinding properties of the high strength RS-SiC. Two types of metal bond diamond wheels (cup type and straight type) were used to grinding tests. The ground surface properties, such as roughness, subsurface damage and micro-step were made clear by measurement or observation. It was confirmed that, both the surface roughness and the depth of micro-step produced by cup-wheel were lower than those produced by straight-wheel. When a #20000 grit sized cup-wheel was used, a considerably high quality mirror surface (Ra<0.8nm) can be achived.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference12 articles.

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2. N. Ebizuka, Y. Dai, H. Eto, W. Lin, T. Ebisuzaki and H. Ohmori: Proc. of SPIE, Vol. 4842 (2003), pp.329-334.

3. S. Suyama, Y. Itoh, A. Kohyama and Y. Katoh: Journal of the Ceramic Society of Japan, Vol. 109 (2001), No. 4, pp.315-321. (in Japanese).

4. K. Tsuno, H. Irikado, K. Hamada, O. Kazuhiko and J. Ishida: Proc. of ICSO, France, Mar. (2004).

5. Y. Yui, T. Kimura and Y. Tange: Proc. of ICSO, France, Mar. (2004).

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