Electromagnetic Enhancement of Carbon Transport in SiC Solution Growth Process: A Numerical Modeling Approach

Abstract

The carbon distribution and its transport in the liquid from the source to the crystal directly affect the control of parasitic nucleation, the growth front stability, and the growth rate during SiC solution growth. Controlling the carbon transport is one of the key issues for understanding and improving the process. In this paper, numerical modeling by finite element method is used to describe the complex convective flow pattern in the melt. We focus on electromagnetic convection and investigate the effect of coil frequency, keeping a simple and technologically realistic crucible design. We show that below a critical value of frequency, the carbon transport can be controlled by the electromagnetic convection, giving rise to significant growth rate enhancement.