Comparisons of Various Physical Cleaning

Abstract

Physical cleaning uses the physical force for particle removing process and the physical force can be represented by PRE(%) and pattern damage. Using the damage proving pattern, which was composed with conductive material for electrical detection, the damage of physical cleaning was quantitatively analyzed. And pattern damage was calculated with a form of damage density and plotted with pattern CD. Using PRE(%) and three parameters, which were derived in the damage density plot, the comparison of various physical cleaning was performed..