The Influence of Liquid Media on the Fracture Strength of Polysilicon Nanostructures

Author:

Peter Daniel1,Dalmer Michael1,Lechner Alfred2,Gigler Alexander M.3,Stark Robert W.4,Bensch Wolfgang5

Affiliation:

1. LAM Research

2. University of Applied Sciences Regensburg

3. Ludwig-Maximilians-Universität München

4. TU-Darmstadt

5. Christian Albrechts Universität Kiel

Abstract

The mechanical stability of nanostructures depends on the surrounding medium. Their stability was probed by lateral force microscopy in liquid media. Previously reported data on water and isopropanol showed an increase in the fracture strength for the latter. Further tests with other alcohols (ethanol, 1-butanol) also showed an increasing strength. The interface between the liquid and the surface is the decisive factor for the influence of the media. When altering the interface with a cationic surfactant or a self-assembled monolayer, an increase of the fracture force by 100 % compared to de-ionized water could be measured.

Publisher

Trans Tech Publications, Ltd.

Subject

Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics

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