Design on High Vacuum System with Molecular Pump-Reference-Cited by-同舟云学术

Design on High Vacuum System with Molecular Pump

Published:2012-11 Issue: Volume:220-223 Page:459-462
ISSN:1662-7482
Container-title:Applied Mechanics and Materials
language:
Short-container-title:AMM

Author:

Zhang Chong¹,Zheng Jin Hua¹,Li Cong Hui¹,Chao Yun Feng¹,Li Long Jun²,Wu Ying Hua²

Affiliation:

1. Zhengzhou University

2. Zhongshan Triumph Vacuum Technology Engineering Co., Ltd

Abstract

This paper aimed at finishing a two-stage oil-free high-vacuum system using a molecular pump as the main pump and a rotary vane pump as the backing pump. Before the pump’s inlet, there is a molecular sieve. With the assistance of the high and low vacuum measuring instruments and other accessories, the system can achieve limiting vacuum of 5×10-5Pa in the vacuum chamber whose volume is 0.085m3 and provide the high vacuum needed for vacuum coating equipments whose magnitude is 100mm.

Publisher

Trans Tech Publications, Ltd.

Link

https://www.scientific.net/AMM.220-223.459.pdf

Reference5 articles.

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