Abstract
(Na0.8K0.2)0.5Bi0.5TiO3 (NKBT20) lead free environmental protection thin films were deposited on Si(100), Pt/Ti/SiO2/Si(100), LaNiO3/SiO2/Si(100) and SrTiO3(STO)/Pt/Ti/SiO2/Si(100) by metal organic decomposition, and the effects of mismatch induced by different seed layers on microstructures, leakage current density, ferroelectric and dielectric properties of these thin films were investigated in detail. The NKBT20/STO thin film with single perovskite phase is of the largest grain size, dielectric constant, remnant polarization and the smallest leakage current density. This could be attributed to the fact that the optimum seed layers can lower the lattice and thermal mismatch between the seed layers and the thin film. The improved electric properties may make NKBT20/STO thin film a promising candidate in micro-electro-mechanical system.
Publisher
Trans Tech Publications, Ltd.
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