Affiliation:
1. Chang Jung Christian University
2. National Cheng Kung University
3. Chienkuo Technology University
Abstract
A nanolayer WN/TiN coating was grown using an industrial-scale four-target reactive sputtering system. Effects of heat treatment on fundamental properties and wear performance of the nanolayer coating were studied. For comparison, a single layer TiN was used as a reference. Characterization was carried out using a nano hardness tester, GDOES, XRD and SEM. Wear performance was evaluated using an SRV® wear tester. It was found that the as-deposited nanolayer WN/TiN coating showed relatively high nano hardness and wear resistance as compared with the single layer TiN. The heat treatment resulted in performance degradation of the nanolayer coating. After 600 °C heat-treatment, the nanolayer coating showed very poor mechanical performance.
Publisher
Trans Tech Publications, Ltd.
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