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Characteristics of TiN/W 2 N multilayers prepared using magnetron sputter deposition with dc and pulsed dc powers

  • Published:2016-10 Issue: Volume:303 Page:25-31
  • ISSN:0257-8972
  • Container-title:Surface and Coatings Technology
  • language:en
  • Short-container-title:Surface and Coatings Technology

Author:

Chang Chi-Lung,Chiou Tz-Heng,Chen Pin-Hung,Chen Wei-Chih,Ho Chun-Ta,Wu Wan-Yu

Funder

National Science Council in Taiwan

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference41 articles.

1. Industrial applications of superhard nanocomposite coatings;Veprek;Surf. Coat. Technol.,2008

2. Interfacial fracture toughness of transition metal nitrides;Chen;Surf. Coat. Technol.,2008

3. In situ scanning electron microscopy indentation studies on multilayer nitride films: methodology and deformation mechanisms;Rzepiejewska-Malyska;J. Mater. Res.,2009

4. Thermal stability of superhard nanocomposite coatings consisting of immiscible nitrides;Männling;Surf. Coat. Technol.,2001

5. NIST-JANAF themochemical tables, fourth ed.;Chase;J. Phys. Chem. Ref. Data Monogr.,1998
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