Affiliation:
1. Hynix Semiconductor Inc.
Abstract
In this paper, we studied stiction behavior of HAR pattern (line and space pattern) dependence on adhesion force with surface tension of drying liquid and surface contact angle. Surface tension effect was evaluated with various drying liquids such as IPA, ethanol and HFE (hydrofluoroether) chemical. Patterns treated by dHF, APM and surface modifier were introduced to investigate dependence of pattern collapse on contact angle. The high temperature D.I. water rinse followed by high temperatures drying using liquid with low surface tension was a most effective. Furthermore, surface modification method using HMDS (hexamethyldisilazane) chemical was also effective.
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
Reference3 articles.
1. K, Joe: The 11th Korea Surface Cleaning Users Group Meeting (KSCUGM), Hanyang University, Ansan, Korea, March 4, (2010).
2. T. Tanaka, M. Morigami, and N. Atoda: Jpn. J. Appl. Phys. Vol. 32 (1993), p.6069.
3. K. Deguchi, K. Miyoshi, T. Ishii and T. Matsuda: Jpn. J. Appl. Phys. Vol. 31 (1992), p.2954.
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