Study of the Effect of Process Induced Uncertainties on the Performance of a Micro-Comb Resonator

Abstract

This paper presents a modeling technique based on the integration in the classic deterministic simulation methods of probabilistic computational techniques such as uncertainty analysis and sensitivity analysis. As study case, it is presented a micro-comb resonator that is actuated electrostatically to vibrate in the plane parallel to the substrate. A deterministic Finite Element coupled electromechanical analysis is performed to evaluate the mode shapes and the corresponding eigenfrequencies of the mobile mass and afterwards a Monte Carlo simulation is used to determine the dispersion of the eigenfrequency of the mode shape of interest in function of the variations of the input parameters. The scatter of the results is analyzed and then it is presented a sensitivity analysis for establishing which of the input parameters have more influence on the variability of the microresonators performance.