Reliability- and performance-based robust design optimization of MEMS structures considering technological uncertainties

Author:

Martowicz Adam,Uhl Tadeusz

Publisher

Elsevier BV

Subject

Computer Science Applications,Mechanical Engineering,Aerospace Engineering,Civil and Structural Engineering,Signal Processing,Control and Systems Engineering

Reference27 articles.

1. Analysis and Design Principles of MEMS Devices;Bao,2005

2. Structural dynamics of microsystems—current state of research and future direction;Lin;Mech. Syst. Sig. Process.,2006

3. Comprehensive Microsystems;Gianchandani,2007

4. Design of microresonators under uncertainty;Mawardi;J. Microelectromech. Syst.,2005

5. Multi-objective design optimization of electrostatically actuated microbeam resonators with and without parameter uncertainty;Liu;Reliab. Eng. Syst. Saf.,2007

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