Design and Performance of the Transverse Rotating Magnetic Field Steered Arc Source Used in Vacuum Arc Deposition

Abstract

In this design, the concept of static magnetic field was given up and the idea of controlling the arc discharge by transverse rotating magnetic field (TRMF) was put forward. Based on the principle of RMF generation, the specific scheme and the cohesiveness integral structure design of the TRMF steered arc source were constructed. In the specific design, a bipolar symmetric RMF (N-S) parallel to the cathode surface and homogenously covered the whole cathode was generated by stationary three-phase windings carrying three-phase alternating currents without any visible physical rotation. Through changing the frequency and the amplitude of the exciting current (these two parameters can be adjusted independently), the speed of rotation and the magnetic intensity could be regulated continuously. Experiments about TRMF steered arc source used in vacuum arc deposition (VAD) showed that: the arc voltage increased with not only an increase in the intensity of magnetic field connected with the supplied current but also an increase in the frequency of magnetic field. TRMF could reduce MPs content to a great extent and get a smooth film surface. A high utilization of the target was achieved due to the homogenous arc discharge covered the entire cathode surface. We believe this design is a new-type arc source and it will bring inspiration and great interest in the VAD domain.