Physics of arcing, and implications to sputter deposition-Reference-Cited by-同舟云学术

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Physics of arcing, and implications to sputter deposition

Published:2006-04 Issue:1-2 Volume:502 Page:22-28
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Anders André

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference51 articles.

1. Gaseous Conductors: Theory and Engineering Applications;Cobine,1958

2. A. Anders, Cathodic Arc Plasma Deposition: from Fractal Spots to Energetic Condensation. New York: Springer, in preparation.

3. Thermionic Emission

4. Cathode spots of electric arcs

5. Cathode Phenomena in a Vacuum Discharge: the Breakdown, the Spark, and the Arc;Mesyats,2000

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