Research on the Chemical-Mechanical Grinding (CMG) Tools for Al2O3Ceramic

Abstract

Aiming at the severe surface/subsurface damage of Al2O3ceramic ground by diamond grinding wheel, the chemical-mechanical grinding (CMG) tools were studied in this paper. According to the principle of CMG, three types of CMG tools with different abrasives were developed. The chemical compositions of the grinding tools were selected and optimized considering the physicochemical characteristics of Al2O3ceramic. By comparing the surface roughness and material removal rate (MRR) of Al2O3ceramic respectively ground with SiO2 , Fe2O3 and MgO grinding tools, the grinding performance of those grinding tools were evaluated. The experiment results showed that the grinding performance of SiO2 grinding tool was the best. The surface roughness and MRR versus SiO2 grinding tool were all better than other grinding tools, and can reach 28 nm and 15 μm/h respectively. The grinding performance of Fe2O3 grinding tool was the worst.