Tribological Properties of DLC Films Deposited at Different Time under Low Temperature

Abstract

The tribological properties of DLC(Diamond like carbon) films deposited for different time on mono-crystalline silicon were investigated by using the UMT-2 micro friction and wear tester. The surface topography, composition and hardness of the films were determined by three-dimensional topography instrument, Raman spectrum and nano mechanics tester. The worn surface topography of the films deposited for different time were observed by scanning electron microscopy. The results show that the thickness of the films deposited for different time is nonlinearly increased with the deposition time. The films are the standard nano-films. The surface hardness of the films is low because the films contain hydrogen composition and the deposition temperature is very low. The films deposited for different time have a good anti-friction property, which is improved when the deposition time is prolonged.