Digital Controller Design for Sense Mode of Micro-Machined Gyroscope

Abstract

This paper presents one kind of digital closed loop control system of MEMS (Micro Electro-Mechanical Systems) vibratory gyroscope, particularly concentrating on the sense mode of MEMS gyroscope. The controller consists of a sine wave source realized by CORDIC algorithm, multiplication demodulators, some low-pass filters and force feedback rebalance module. Compared with the open loop sense system of gyroscope, the closed loop sense system has larger measurement range and wider bandwidth. Besides, the sine wave source realized with CORDIC algorithm can save hardware resources. The digital system is demonstrated on a PCB with a FPGA on it. The test results show that the measurement range of the closed loop system can be increased to 3 times by the open loop, and the bandwidth can be extended to 262Hz from 27Hz of the open loop system.