Impact of MEMS technology on society-Reference-Cited by-同舟云学术

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Impact of MEMS technology on society

Published:1996-08 Issue:1-2 Volume:56 Page:1-9
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bryzek Janusz

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Piezoresistive effect in germanium and silicon;Smith;Phys. Rev.,1954

2. Silicon as a mechanical material;Petersen,1982

3. Microengineering Technology for Space Systems;Helvajian,1995

4. Micromachines on the march;Bryzek;IEEE Spectrum,1994

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