Affiliation:
1. Academy of Military Transportation
2. Tianjin University
Abstract
A new 2-DOF precision positioning table of high speed and accuracy, directly driven by voice coil actuator, is put forward. And a novel elastic decoupling mechanism is introduced in the table. In order to study its dynamic characteristic when the table works at high speed and high acceleration, the table FEA model is built and the FEA is carried out. Based on the FEA results, the position planes displacement on X, Y and Z axis of the 2-DOF table is simulated respectively, the simulation results can provide reference for the table dynamic structural design.
Publisher
Trans Tech Publications, Ltd.
Reference5 articles.
1. Yasuo Wada, NEMS/MEMS tools for nanoelectronics development, Current Applied Physics, No. 2(2002), pp.331-334.
2. Henry Baltes, Oliver Brand and Marc Waelti, Packaging of CMOS MEMS, Microelectronics Reliability, No. 40(2000), pp.1255-1262.
3. Ken Yanagisawa, et al: Two dimensional drive system, U.S. Patent 006, 327, 929 B1(2001).
4. Nobuto Yamazaki and Minoru Torihata, X-Y table for bonding devices, U.S. Patent, No. 005, 157, 985 A, 2000, Oct. 27.
5. Ronald K. Kerschner: Differential motor drive for an XY stage, U.S. Patent 006, 070, 480 A(2000).