Affiliation:
1. Sharif University of Technology
Abstract
In this paper, a comprehensive model is used to describe dynamic behavior of SDA and its components during stepwise motion. In this model, Hamilton’s principle and Newton's method are used to extract dynamic equations of the SDA plate and dynamic equation for the linear motion of SDA. Comparison between the modeling results and available experimental data shows that this model is very effective in predicting some design objectives such as step size and output force for this type of actuators.
Publisher
Trans Tech Publications, Ltd.
Reference21 articles.
1. T. Akiyama and K. Shono: J. of Microelectromechanical Systems Vol. 2 (1993), p.106.
2. L. Li, J.G. Brown and D. Uttamchandani: J. Micromech. Microeng. Vol. 12 (2002), p.736.
3. Y. Kanamori, Y. Aoki, M. Sasaki, H. Hosoya and A. Wada: J. Micromech. Microeng. Vol. 15 (2005), p.118.
4. Y. Kanamori, H. Yahagi and K. Hane: Sens. Actuators A, Vol. 125 (2006), p.451.
5. P. Langlet, D. Collard, T. Akiyama and H. Fujita: in Proc. IEEE Int. Conference on Solid-State Sensors and Actuators (Transducers' 97), Chicago, IL, (1997), p.773.