A microtranslation table with scratch-drive actuators fabricated from silicon-on-insulator wafer-Reference-Cited by-同舟云学术

A microtranslation table with scratch-drive actuators fabricated from silicon-on-insulator wafer

Published:2006-01 Issue:2 Volume:125 Page:451-457
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kanamori Y.,Yahagi H.,Hane K.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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