Nanomechanical Measurement Methods on the Basis of MEMS

Abstract

Recently microelectromechanical systems (MEMS) have found increasingly more applications in measurement technique in form of sensors and actuators. Here a report on the development and test of nanomechanical measurement methods and systems on the basis of MEMS will be delivered. A nanoforce actuator, a nanotensile test system which are all realized in the form of MEMS are in the focus. Design and numerical simulation of the nanoforce actuator with the help of finite element analysis (FEA) are detailed . In the article the principle of these measurement systems, the design, the manufacture and the assembly of the MEMS as well as first test results and achieved performance parameters are described.