MEMS actuators and sensors: observations on their performance and selection for purpose-Reference-Cited by-同舟云学术

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MEMS actuators and sensors: observations on their performance and selection for purpose

Published:2005-06-20 Issue:7 Volume:15 Page:S153-S164
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Bell D J,Lu T J,Fleck N A,Spearing S M

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference70 articles.

1. Application of MEMS technology in automotive sensors and actuators

2. The selection of mechanical actuators based on performance indices

3. Actuator Classification and Selection—The Development of a Database

4. The selection of sensors

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