Development of Piezo Driven Motion Amplified Stage

Abstract

This paper presents a novel piezo driven motion stage employing multiple motion levers allowing for an amplification ratio that exceeds 60x enabled by a newly contrived cross hinge structure. Measurements of the motion stage were made using an optical microscope. The motion stage was incorporated into a visually served close loop motion control scheme and experimental results prove that the feedback system is capable of 20nm nanostepping.