An Observation Method of Real Contact Area during PVA Brush Scrubbing

Abstract

In the post CMP cleaning, the contact condition between PVA brush and surface is very important. In this study, we observed the real contact area between a brush and surface using a collimating LED light and prism. As a result, we found that the real contact area increases with increasing the brush compression. In addition, we also found that the real contact area decreases when the brush starts to move, and the brush was locally compressed due to its deformation.