Affiliation:
1. NOVASiC
2. Ion Beam Services
3. Université Côte d’Azur, CNRS-CRHEA
Abstract
In this contribution we investigate the formation at high temperature of an oriented 3C-SiC seed on various orientations of Si substrates “pre-carbonized” through Plasma Immersion Ion Implantation (PIII) process.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
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Cited by
2 articles.
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