4H-SiC PIN Diode as High Temperature Multifunction Sensor

Author:

Hou Shuo Ben1,Hellström Per Erik1,Zetterling Carl Mikael1,Östling Mikael1

Affiliation:

1. KTH Royal Institute of Technology

Abstract

An in-house fabricated 4H-SiC PIN diode that has both optical sensing and temperature sensing functions from room temperature (RT) to 550 °C is presented. The two sensing functions can be simply converted from one to the other by switching the bias voltage on the diode. The optical responsivity of the diode at 365 nm is 31.8 mA/W at 550 °C. The temperature sensitivity of the diode is 2.7 mV/°C at the forward current of 1 μA.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

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1. Characteristics of SiC Power Diodes at Extreme Temperatures;2023 IEEE 14th International Symposium on Power Electronics for Distributed Generation Systems (PEDG);2023-06-09

2. A Highly Linear Temperature Sensor Operating up to 600°C in a 4H-SiC CMOS Technology;IEEE Electron Device Letters;2023-06

3. A Silicon Carbide 256 Pixel UV Image Sensor Array Operating at 400 °C;IEEE Journal of the Electron Devices Society;2020

4. 400 °C Sensor Based on Ni/4H-SiC Schottky Diode for Reliable Temperature Monitoring in Industrial Environments;Sensors;2019-05-24

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