Demonstration of Light-Emitting Two-Dimensional Photonic Crystals Composed of Silicon-Rich Silicon-Dioxide Thin Films

Abstract

A light-emitting, two-dimensional photonic crystal composed of silicon-rich silicon-dioxide thin film was fabricated by using radio-frequency magnetron sputtering, simple interference exposure, and plasma etching. An enhanced photoluminescence spectrum was observed from the photonic crystal. We found that the photoluminescence peak was located around a wavelength of 830 nm and that the peak intensity was 1.5 times stronger than that from a silicon-rich silicon-dioxide thin film without a periodic structure.