Affiliation:
1. Faculty of Electrical Engineering
Abstract
Introduction of pulse plasma power supply is one of the major contributions to plasma
surface engineering. The voltage and current waveforms of nitrogen and nitrogen/hydrogen glow discharges in the vacuum total pressure range from 0.1 to 15 mbar were recorded and analyzed concerning the shape, typical operating values and the influence of surface treatment process parameters. It was found that the waveform shape of the voltage and current contains information on pulse generator output parameters and vacuum system properties during normal glow, hollow cathode discharge and arcing. We have also performed the scoping of dynamic parameters and static characteristic, in order to obtain information for the generator and chamber modeling, to be used in a future plasma materials treatment processes control. The influence of process parameters such as total pressure, cathode temperature and biasing voltage on current-voltage characteristics was also considered.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
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