Affiliation:
1. Anhui University of Architecture
2. Anhui Jianzhu University
3. Anhui Jianzhu University
Abstract
A wavelength of 1064nm Nd: YAG laser was used to groove on silicon, then studying the affect of quality and processing efficiency by incoming jet in laser etching course of silicon: Water jet reduced doss, cracks and other defects which might be produced on the surface of groove. Software of matlab was used to restore the topography of tank’s bottom; analysis shown that the water jet had a scouring effect influence on tank’s bottom. Introduction of the water jet caused the loss of the laser energy, but it could improve processing efficiency indirectly by blowing away the slag.
Publisher
Trans Tech Publications, Ltd.
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