Abstract
Real time observation of SiC oxidation was performed using an in-situ ellipsometer over
the temperature range from 900°C to 1150°C. The relations between oxide thickness and oxidation
time were obtained precisely by virtue of the real time measurements. We analyzed the relations
between oxide thickness and oxidation time by applying the Deal and Grove model to obtain the
linear and parabolic rate constants. Taking advantage of in-situ measurements, we successfully obtained
the oxidation rate constants with high accuracy.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
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