Plasma Polymerization of Hexamethyldisiloxane and Tetraethoxysilane Thin Films for Humidity Sensing Application-Reference-Cited by-同舟云学术

Plasma Polymerization of Hexamethyldisiloxane and Tetraethoxysilane Thin Films for Humidity Sensing Application

Published:2014-06 Issue: Volume:354 Page:41-47
ISSN:1662-9507
Container-title:Defect and Diffusion Forum
language:
Short-container-title:DDF

Author:

Guermat N.¹,Bellel A.¹,Sahli Salah²,Segui Yvan³,Raynaud Patrice³

Affiliation:

1. Université Mentouri de Constantine

2. Université Mentouri Constantine

3. Université Paul Sabatier

Abstract

Humidity sensitive layers elaborated from pure HMDSO and TEOS by PECVD technique have been studied. Humidity sensing properties including impedance relative humidity (RH) and current RH characteristics were investigated. TEOS films show higher sensitivity and excellent linearity over the explored range of humidity (20–95% RH). However, HMDSO films exhibits a small response and recovery of about 8 and 34 s for humidification and desiccation, respectively, in addition to very low hysteresis (2%). Structural analyses of sensitive layers were characterized by Fourier transform infrared spectroscopy (FTIR).

Publisher

Trans Tech Publications, Ltd.

Subject

Condensed Matter Physics,General Materials Science,Radiation

Link

https://www.scientific.net/DDF.354.41.pdf

Reference14 articles.

1. I. Fratoddi, P. Altamura, A. Bearzotti, A. Furlani, M.V. Russo, Thin Solid Films Vol. 458 (2004), p.292–298.

2. M. Almasi Kashi, A. Ramazani, H. Abbasian, A. Khayyatian, Sensors and Actuators A Vol. 174 (2012), p.69–74.

3. Y. Jun Liu, J. Shi, F. Zhang, H. Liang, J. Xu, A. Lakhtakia, S. J. Fonash, T. Jun Huang, Sensors and Actuators B Vol. 15 (2011), p.593– 598.

4. E. Radeva, K. Bobev and L. Spassov, Sensors and Actuators B Vol. 8 (1992), pp.21-25.

5. M. Loughran, S.W. Tsai, K. Yokoyama, I. Karube, Current Applied Physics Vol. 3 (2003), p.495–499.

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