Modeling of Interdigital Electrodes Geometrical Parameters Effects on Chemical Sensor Response

Abstract

The detection of volatile organic compounds (VOCs), humidity and toxic industrial chemicals is important for various environmental and industrial applications. The design of interdigital capacitor (IDCs) sensor is carried out in such a way that it would be suitable for microelectronic technology. The basic geometry of IDCs is defined by some parameters such as: number of electrodes N, electrode width W, electrode length L and the separation between electrodes G. The interactions between IDCs sensitive coating and analyte induced a change in the sensors capacitance due to the permittivity variation of the sensitive layer and to the change in polymer thickness (swelling). In this work, a fairly new approach of IDCs based sensor in terms of capacitance calculation has been presented. The results have been obtained from the modeling of the sensors geometry 2D and 3D using multi-physics simulation software COMSOL. The effects of some geometry parameters coupled with swelling measurements for polymeric films have been studied.