Analysis of Non-Uniform Contamination Profiles by Lifetime Data-Reference-Cited by-同舟云学术

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Analysis of Non-Uniform Contamination Profiles by Lifetime Data

Published:1998-12 Issue: Volume:63-64 Page:413-420
ISSN:1662-9779
Container-title:Solid State Phenomena
language:
Short-container-title:SSP

Author:

Polignano Maria Luisa¹,Caputo Domenico²,Pavia Giuseppe³,Zanderigo F.

Affiliation:

1. ST Microelectronics

2. Rome ' La Sapienza'

3. Carl Zeiss NTS GmbH

Publisher

Trans Tech Publications, Ltd.

Subject

Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics

Link

https://www.scientific.net/SSP.63-64.413.pdf

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Molybdenum and Tungsten Contamination in MOS Capacitors;ECS Journal of Solid State Science and Technology;2016

2. Detection of Metal Segregation at the Oxide-Silicon Interface;Journal of The Electrochemical Society;2002

3. Metal contamination reduction in the evolution of ion implantation technology;2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)

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