A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors-Reference-Cited by-同舟云学术

A MEMS Position Encoder for Comb-Drive Actuators Using Suspended Gate Field-Effect Transistors

Published:2006-12 Issue: Volume:326-328 Page:1379-1382
ISSN:1662-9795
Container-title:Key Engineering Materials
language:
Short-container-title:KEM

Author:

Lin Tung Wei¹,Hou Max Ti Kuang¹,Chen Rong Shun¹

Affiliation:

1. National Tsing Hua University

Abstract

Utilizing suspended gate field-effect transistors (SGFETs), a displacement sensing mechanism is proposed in this paper. The design, numerical simulations, and fabrication process of the SGFET are presented. The SGFET arrays and the comb-drive actuator are integrated to form a MEMS position encoder. The resolution of the proposed MEMS position encoder is 6 μm over a 54 μm travel range. By arranging the SGFETs into arrays, position feedback over a large travel range is achieved for a comb-drive actuator.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.scientific.net/KEM.326-328.1379.pdf

Reference5 articles.

1. M. T. K. Hou, G. K. W. Huang, J. Y. Huang, K. M. Liao, R. Chen, and J. L. A. Yeh: J. Micromech. Microeng., Vol. 16 (2006), p.684.

2. A. A. Kuijpers, R. J. Wiegerink, G. J. M. Krinjnen, T. S. J. Lammerink, and M. Elwenspoek: Proc. IEEE Int'l Conf. on MEMS (2004), p.544.

3. L. Wang, J. M. Dawson, L. A. Hornak, P. Famouri, and R. Ghaffarian: IEEE Trans. Aerospace and Electronic Sys. Vol. 40 (2004), p.567.

4. I. H. Song and P. K. Ajmera: Proc. SPIE - The Int'l Society for Optical Engineering Vol. 5389 (2004), p.267.

5. R. S. Muller, T. I. Kamins, and M. Chan: Device Electronics for Integrated Circuits 3 rd Edition, John Wiley & Sons (2003).

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Engineering a Compliant Mechanical Amplifier for MEMS Sensor Applications;Journal of Microelectromechanical Systems;2020-04

2. Direct Binary Encoding of Displacements on the Nano-Scale;2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS);2020-01

3. How to Defeat Electric Noise in Measurement Acquisition Using a Micromechanical Analog-to-Digital Converter;2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII);2019-06